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GF125 系列产品是第二代多变量压力变化补偿型 (PTI) 金属密封质量流量控制器和仪表，有着超快的响应速度和超高的纯度。作为个将 PTI 质量流量控制技术引入市场的 GF125 系列产品限度降低了压力和温度波动导致的过程气体流量变化。一台采用标准 MultiFlo™ 技术的 MFC 即可满足数千种气体类型和各种量程组合的需求，无需从气路上拆除 MFC 并且不影响精度。
结果：降低了气体显示屏尺寸和成本，这得益于省去了压力调节器、压力传感器和相关硬件的使用并辅以行业的 PTI 性能以限度提高产率和生产效率。
便捷的维护端口
| GF125 | GF126 | |
| 区别 | Ultra-High Purity Ultra-Fast Response Time Pressure Transient Insensitivity | High Flow Rate |
| 流量范围-满量程容量 | 3 sccm - 55 slm | 55 slm - 300 slm |
| 表面抛光 | 4µ inch Ra | 4µ inch Ra |
| 精度 | ±1% S.P. > 35-99% ±0.35% F.S. 2-35% | ±1% S.P. > 35-99% ±0.35% F.S. 2-35% |
| 重复性 | < ±0.15%=""> | < ±0.15%=""> |
| 响应时间-常闭 | Normally Closed Valve 300ms (3-860 sccm N2 Eq.) 400ms (861-7200 sccm N2 Eq.) 500ms (7201-30000 sccm N2 Eq.) <700ms (30001-55000="" sccm="" n2="">
| Normally Closed Valve <1>
|
| 响应时间-常开 | Normally Open Valve <1.5> | Normally Open Valve — |
| 多气体多量程 | MultiFlo™ Standard | MultiFlo™ Standard |
| 瞬时压力波动不敏感 | ±5% S.P. up to 5 psi/sec upstream press. spike | Ability to measure inlet pressure |
| 诊断能力 | Status Lights - MFC Health, Network Status Alarms - Control Valve Output, Network Interruption | Status Lights: MFC Health & Network Status Alarms: Control Valve Output & Network Interruption |
| 模拟通讯 | 0-5 Vdc | 0-5 Vdc |
| 数字通讯 | RS485 L Protocol DeviceNet™ | RS485 L Protocol DeviceNet™
|
Mass Flow Controller
Ultra-High Purity
Ultra-Fast Response Time
Pressure Transient Insensitivity
3 sccm - 300 slm
±1% S.P. > 35-99%
±0.35% F. S. 2-35%
±0.5% F.S. (included in accuracy)
300ms - < 1="">
Normally Open Valve: <1.5>
(specific models only)
<5% s.p.="" for up="" to="" 5="" psi/sec="" upstream="" press.="">
< 5="" -="">
Standard GF Series: 11 bins
High Flow GF Series: 4 bins
< 2%="">
Span: 0.05% S.P. per °C
Zero: 0.005% F.S. per °C
Metal
SEMI F20 HP Compliant
316L VIM/VAR
Hastelloy C-22
316L Stainless Steel
304 Stainless Steel
KM-45
Normally Closed
Normally Open (specific models)
Meter (no valve)
3-860 sccm = 7-45 psid
861 - 7200 sccm = 10 - 45 psid
7201 - 55000 sccm = 15 - 45 psid
51 - 300 slm = 30 - 90 psid
*Typical pressure drops. Contacts Brooks Technical Support for more information.
Standard GF Series: 100 psia max
High Flow GF Series: 75 psig (controller), 150 psig (meter)
MFC Health
Network Status
Control Valve Output
Network Interruption
RS485 via 2.5mm jack (all models)
Top Mount Integrated LCD
Viewing Angle: Fixed
Viewing Distance: 10 feet
Units Displayed: Flow (%), Temp (°C), Pressure (psia, kPa)
Resolution: 0.1 (unit)
0-5 Vdc
DeviceNet™
RS485 L-Protocol
Analog/RS485 via 9-Pin "D" connector
DeviceNet™ via 5-Pin "M12" connector
Various cable adaptors available. See product data sheet for more information.
Analog/RS485 L Protocol: 6 Watts max @ ±15 Vdc (±10%) or +24 Vdc (±10%)
DeviceNet™: 545 mA max @ +11-25 Vdc, 250 mA max @ 24 Vdc
(Under typical operating conditions)
EC Directive 2004/108/EC
CE: EN61326-1: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006
| Filename | File Type | Documents By Language |
|---|---|---|
| Data Sheet - GF125 | English Japanese | |
| Data Sheet - GF126 | English | |
| Installation & Operation Manual | English | |
| DeviceNet™ Supplemental Manual - GF100 Series | English | |
| RS485 L-Protocol Supplemental Manual - GF100 Series | English |
Use the following guide (model code information from data sheet) to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.
Example: GF125 - WX (Fitting) - GX (Connector) - STEP
| Model Series | Fitting | Connector | File Type |
| GF1xx | AS - 1-1/2” body width, 92 mm 0.440” large bore C Seal (only for bins SH45-SH50) | BX - Cable adapter to 15 pin D Brooks (Unit “B”,”N”) adapts G1 base | STEP |
| CX - 1-1/8” body width, 92 mm C Seal | *DX - DeviceNet™ 5 pin micro | ||
| VX - 1-1/2” body width, 124mm 1/4” VCR male | EX - Cable adapter to Card Edge (w/o VTP), RS485 through RJ11 jacks (Unit”E”; IN “L”, “R”) adapts GX base | ||
| WX - 1-1/8” body width, 92mm W Seal | GX - 9-Pin D with RS485 (Unit”G”); display and overlay 180 degree orientation | ||
| G1 - 9-Pin D with RS485 (Unit”G”) | |||
| SX - 9 pin D with STEC pin-out (w/VTP) (Unit”S”,”Q”) |
| Filename | File Type |
|---|---|
| GF100-GF120-GF125-AS-G1 | STEP |
| GF100-GF120-GF125-AS-SX | DXF |
| GF100-GF120-GF125-AS-SX | IGS |
| GF100-GF120-GF125-AS-SX | STEP |
| GF100-GF120-GF125-AX-G1 | STEP |
| GF100-GF120-GF125-AX-G1 | IGS |
| GF100-GF120-GF125-CX-DX | STEP |
| GF100-GF120-GF125-CX-SX | DXF |
| GF100-GF120-GF125-CX-SX | STEP |
| GF100-GF120-GF125-CX-TX | STEP |
| GF100-GF120-GF125-CX-TX | IGS |
| GF100-GF120-GF125-CX-TX | DXF |
| GF100-GF120-GF125-DX-DX | DXF |
| GF100-GF120-GF125-DX-DX | IGS |
| GF100-GF120-GF125-DX-DX | STEP |
| GF100-GF120-GF125-DX-TX | DXF |
| GF100-GF120-GF125-DX-TX | IGS |
| GF100-GF120-GF125-DX-TX | STEP |
| GF100-GF120-GF125-VS-SX | STEP |
| GF100-GF120-GF125-VS-SX | IGS |
| GF100-GF120-GF125-VS-SX | DXF |
| GF100-GF120-GF125-VX-BX | STEP |
| GF100-GF120-GF125-VX-DX | STEP |
| GF100-GF120-GF125-VX-E0 | DXF |
| GF100-GF120-GF125-VX-E0 | IGS |
| GF100-GF120-GF125-VX-E0 | STEP |
| GF100-GF120-GF125-VX-EX | STEP |
| GF100-GF120-GF125-VX-G1-STEP | STEP |
| GF100-GF120-GF125-VX-GX-STEP | STEP |
| GF100-GF120-GF125-VX-SX-STEP | STEP |
| GF100-GF120-GF125-WX-GX-STEP | STEP |
| GF101-GF121-GF126-V1-D0 | DXF |
| GF101-GF121-GF126-V1-D0 | IGS |
| GF101-GF121-GF126-V1-D0 | STEP |
| GF101-GF121-GF126-V1-DX | DXF |
| GF101-GF121-GF126-V1-DX | IGS |
| GF101-GF121-GF126-V1-DX | STEP |
| GF101-GF121-GF126-V1-E0 | DXF |
| GF101-GF121-GF126-V1-E0 | IGS |
| GF101-GF121-GF126-V1-E0 | STEP |
| GF101-GF121-GF126-V1-G1 | DXF |
| GF101-GF121-GF126-V1-G1 | IGS |
| GF101-GF121-GF126-V1-G1 | STEP |
| GF101-GF121-GF126-V2-G1 | DXF |
| GF101-GF121-GF126-V2-G1 | IGS |
| GF101-GF121-GF126-V2-G1 | STEP |
| GF101-GF121-GF126-V2-SX | DXF |
| GF101-GF121-GF126-V2-SX | IGS |
| GF101-GF121-GF126-V2-SX | STEP |
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